This website uses cookies to make the offer more user-friendly and effective. Please agree to the use of cookies in order to be able to use all functions of the website.Further information

26 - 28 February 2019 // Nuremberg, Germany

Posting print layout

What information should be shown in the print layout?

Create print layout
Exhibitors & Products embedded world 2018
Zoom product LOGO_High voltage MEMS array

High voltage MEMS array

LOGO_High voltage MEMS array

High voltage MEMS array

Request information Request information

Contact us

Please enter your personal information and desired appointment. You can also leave us a message.

Your personal information

Your message for us

Desired appointment during the exhibition

* Compulsory fields you must fill in.
Your message has been sent.

You do not have a registration yet? Register now and use all advantages of the Exhibitor Database.

An error has occurred.

AnSem's customer is building an advanced machine that is processing terabytes of data during operation. At the heart of this machine is an array with more than 3000 MEMS switches. These need to be controlled by a programmable high voltage that is symmetrical around the chip substrate..

AnSem designed an ASIC containing all the supporting circuitry for the MEMS. On this ASIC, the MEMS array is postprocessed after regular CMOS silicon processing. Each MEMS is programmed by a control voltage with a range between -15V and +15V relative to the silicon substrate.

The voltage at each MEMS is controlled by an 9b current steering DAC with current steps of 500nA, which are then converted in high voltage driving signals.

Furthermore a diagnosis is built-in that detects a faulty condition of the MEMS.

Distributed over the array, multiple temperature sensors are placed to monitor the temperature over the chip.

Due to the large size of the MEMS array, special attention needed to be given to the layout of the array:

  • The control logic is placed in the neighborhood of each MEMS and fully symmetrical so that the routing to all MEMS is well-balanced.
  • Analog signals are communicated via current between different locations on chip and between power domains
  • Deep N-well and high voltage pockets are used to have isolation substrates per local power domain
  • The digital signals are regenerated  in each power domain.
  • Special techniques are used to avoid IR drop 

The ASIC is programmed through an SPI interface.

AnSem selected as technology 0.18µm 40V BCD CMOS GEN II from TSMC. The main interesting feature for this application is the double isolated high voltage pockets that allow operation of MOS devices at voltages below the substrate without injecting substrate currents.

AnSem manages the complete ASIC life cycle including design, prototyping, industrialization and supply chain for volume production.

Key technical statistics

  • Dual supply rail support: +15V, -15V
  • +-12V output voltage range
  • Clock switched 9b steering capacitor DAC
  • 5 built in, on chip temperature sensors
  • 0.18µm 40V BCD CMOS GEN II from TSMC

ARTIC, ARGOS-3-4 single chip radio

LOGO_ARTIC, ARGOS-3-4 single chip radio



Batteryless wireless sensor ASIC for the diagnosis of glaucoma

LOGO_Batteryless wireless sensor ASIC  for the diagnosis of glaucoma

ISO 26262 compliant automotive IC building blocks

LOGO_ISO 26262 compliant automotive IC building blocks

The selected entry has been placed in your favourites!

If you register you can save your favourites permanently and access all entries even when underway – via laptop or tablet.

You can register an account here to save your settings in the Exhibitors and Products Database and as well as in the Supporting Programme.The registration is not for the TicketShop and ExhibitorShop.

Register now

Your advantages at a glance:

  • Advantage Save your favourites permanently. Use the instant access to exhibitors or products saved – mobile too, anytime and anywhere – incl. memo function.
  • Advantage The optional newsletter gives you regular up-to-date information about new exhibitors and products – matched to your interests.
  • Advantage Call up your favourites mobile too! Simply log in and access them at anytime.